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Graphene Synthesis, Catalysis with Transition Metals and Their Interactions by Laser Photolysis 67 Fig. 10. Schematic illustration of a typical CVD system [From B W Mwakikunga PhD thesis, University of the Witwatersrand (2009)] Precursor Hydrocarbons Hydrocarbons Methane Ethylene Methane and H2 Iron tetra-pyridino- porphyrazine Methane on HOPG Methane Methane Methane Temperature 900 - 1000 oC 850-1000 oC 1000 oC 700 oC 1400-1900 oC Pressure Std P Std P Atm, Torr Vacuum Catalyst Bi-metallic c-sapphire, Co/SiO2 and H2 (annealing) Ni and Cu in ammonia Bi-metallic Ni thin film Cu Fe Co on MgO Argon flow Fe 6H SiC Type of CVD RF-CVD Epitaxial CVD RF-CVD CVD Pyrolysis APCVD LPCVD UHVCVD PECVD PECVD References E. Dervishi 2011 H Ago et al 2010 Park et al 2010 E. Dervishi 2010 Lee et al 2010 Xu et al 2010 Bhaviripudi et al 2010 Kholmanov 2010 Wang, X (2009) Malesevic 2008 Cambaz, Z.G., (2008) methane Table 1. A summary of some of the parameters for obtaining graphene by CVDPDF Image | GRAPHENE SYNTHESIS CHARACTERIZATION PROPERTIES
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