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Nucleation and Vertical Growth of Nano-Graphene Sheets 29 60 40 20 00 5 10 15 H2 gas flow rate (sccm) Fig. 7. Height of CNWs as a function of the H2 gas flow rate. Vacuum ultraviolet absorption spectroscopy (VUVAS) was applied to measure the absolute density of H radicals during simultaneous irradiation with CFX radicals, H radicals, and Ar+ ions.[18-20] The procedure to estimate the H radical density was described in detail in ref. 17- 19. Figure 8 shows that the H radical density increased almost linearly with the H2 gas flow rate, and the highest density of 4.3×1011 cm-3 was obtained at a H2 gas flow rate of 7 sccm. 5 4 3 2 1 00 2 4 6 8 10 H2 gas flow rate (sccm) Fig. 8. Absolute density of H radicals as a function of the H2 gas flow rate measured using VUVAS. CNW growth Etching Absolute density of H radical (x1011 cm-3) Height of CNW (nm)PDF Image | GRAPHENE SYNTHESIS CHARACTERIZATION PROPERTIES
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